# Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner

> Research article (IFAC-PapersOnLine, 2017) · cited 10× · AI/ML

**Wikidata**: [openalex:W2766544995](https://www.wikidata.org/wiki/openalex:W2766544995)  
**Source**: https://4ort.xyz/entity/kalman-filter-enabled-high-speed-control-of-a-mems-nanopositioner