# Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2023) · cited 11× · AI/ML

**Wikidata**: [openalex:W4364323002](https://www.wikidata.org/wiki/openalex:W4364323002)  
**Source**: https://4ort.xyz/entity/iterative-learning-based-predictive-control-method-for-electronic-grade-silicon-single-crystal-batch-process
