# Ion-beam sputtered amorphous silicon films for cryogenic precision measurement systems

> Research article (Physical review. D. Particles, fields, gravitation, and cosmology/Physical review. D, Particles, fields, gravitation, and cosmology, 2015) · cited 36× · AI/ML

**Wikidata**: [openalex:W2114203558](https://www.wikidata.org/wiki/openalex:W2114203558)  
**Source**: https://4ort.xyz/entity/ion-beam-sputtered-amorphous-silicon-films-for-cryogenic-precision-measurement-systems