# Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory

> Research article (Scientific Reports, 2015) · cited 49× · AI/ML

**Wikidata**: [openalex:W2342454616](https://www.wikidata.org/wiki/openalex:W2342454616)  
**Source**: https://4ort.xyz/entity/ion-beam-nanopatterning-of-iii-v-semiconductors-consistency-of-experimental-and-simulation-trends-within-a-chemistry-dri