# Ion beam modification of the Ni-Si solid-phase reaction: The influence of substrate damage and nitrogen impurities introduced by ion implantation

> Research article (Journal of Physics D Applied Physics, 2020) · cited 13× · AI/ML

**Wikidata**: [openalex:W3056670799](https://www.wikidata.org/wiki/openalex:W3056670799)  
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