# Ion beam lithography

> lithographic technique that uses a scanning ion beam

**Wikidata**: [Q1672059](https://www.wikidata.org/wiki/Q1672059)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/Ion_beam_lithography)  
**Source**: https://4ort.xyz/entity/ion-beam-lithography


## References

1. [OpenAlex](https://docs.openalex.org/download-snapshot/snapshot-data-format)