# Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance

> Research article (ECS Journal of Solid State Science and Technology, 2020) · cited 32× · AI/ML

**Wikidata**: [openalex:W3043518454](https://www.wikidata.org/wiki/openalex:W3043518454)  
**Source**: https://4ort.xyz/entity/investigation-of-the-impact-of-pad-surface-texture-from-different-pad-conditioners-on-the-cmp-performance