# Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners

> Research article (IEEE Transactions on Control Systems Technology, 2016) · cited 33× · AI/ML

**Wikidata**: [openalex:W2343538716](https://www.wikidata.org/wiki/openalex:W2343538716)  
**Source**: https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners