# Interfacial Silicide Formation and Stress Evolution during Sputter Deposition of Ultrathin Pd Layers on a-Si

> Research article (ACS Applied Materials & Interfaces, 2019) · cited 12× · AI/ML

**Wikidata**: [openalex:W2975167501](https://www.wikidata.org/wiki/openalex:W2975167501)  
**Source**: https://4ort.xyz/entity/interfacial-silicide-formation-and-stress-evolution-during-sputter-deposition-of-ultrathin-pd-layers-on-a-si