# Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges

> Research article (Small Science, 2023) · cited 15× · AI/ML

**Wikidata**: [openalex:W4386999017](https://www.wikidata.org/wiki/openalex:W4386999017)  
**Source**: https://4ort.xyz/entity/interfaces-in-atomic-layer-deposited-films-opportunities-and-challenges