# Intensity modulation based optical proximity optimization for the maskless lithography

> Research article (Optics Express, 2019) · cited 37× · AI/ML

**Wikidata**: [openalex:W2997434844](https://www.wikidata.org/wiki/openalex:W2997434844)  
**Source**: https://4ort.xyz/entity/intensity-modulation-based-optical-proximity-optimization-for-the-maskless-lithography