# Integrated system and control design of a one DoF nano-metrology platform

> Research article (Mechatronics, 2017) · cited 28× · AI/ML

**Wikidata**: [openalex:W2755224179](https://www.wikidata.org/wiki/openalex:W2755224179)  
**Source**: https://4ort.xyz/entity/integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform