# Integrated Planar 6-DOF Nanopositioning System

> Research article (IFAC-PapersOnLine, 2019) · cited 13× · AI/ML

**Wikidata**: [openalex:W2996266722](https://www.wikidata.org/wiki/openalex:W2996266722)  
**Source**: https://4ort.xyz/entity/integrated-planar-6-dof-nanopositioning-system