# Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

> Research article (Sensors and Actuators A Physical, 2018) · cited 31× · AI/ML

**Wikidata**: [openalex:W2791581107](https://www.wikidata.org/wiki/openalex:W2791581107)  
**Source**: https://4ort.xyz/entity/integrated-3-axis-tactile-sensor-using-quad-seesaw-electrode-structure-on-platform-lsi-with-through-silicon-vias