# Inspection and Classification of Semiconductor Wafer Surface Defects Using CNN Deep Learning Networks

> Research article (Applied Sciences, 2020) · cited 111× · AI/ML

**Wikidata**: [openalex:W3047291564](https://www.wikidata.org/wiki/openalex:W3047291564)  
**Source**: https://4ort.xyz/entity/inspection-and-classification-of-semiconductor-wafer-surface-defects-using-cnn-deep-learning-networks