# Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films

> Research article (Materialia, 2018) · cited 16× · AI/ML

**Wikidata**: [openalex:W2906102275](https://www.wikidata.org/wiki/openalex:W2906102275)  
**Source**: https://4ort.xyz/entity/influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f