# Influence of N2 partial pressure on structural and microhardness properties of TiN/ZrN multilayers deposited by Ar/N2 vacuum arc discharge

> Research article (Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 2016) · cited 34× · AI/ML

**Wikidata**: [openalex:W2409232739](https://www.wikidata.org/wiki/openalex:W2409232739)  
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