# Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

> Research article (Microsystem Technologies, 2020) · cited 23× · AI/ML

**Wikidata**: [openalex:W3094407298](https://www.wikidata.org/wiki/openalex:W3094407298)  
**Source**: https://4ort.xyz/entity/influence-of-fabrication-tolerances-on-performance-characteristics-of-a-mems-gyroscope