# In-situ ovenization of Lamé-mode silicon resonators for temperature compensation

> Research article (2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015) · cited 24× · AI/ML

**Wikidata**: [openalex:W2088518942](https://www.wikidata.org/wiki/openalex:W2088518942)  
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