# Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

> Research article (Surface and Coatings Technology, 2023) · cited 42× · AI/ML

**Wikidata**: [openalex:W4381056643](https://www.wikidata.org/wiki/openalex:W4381056643)  
**Source**: https://4ort.xyz/entity/improving-the-crystallinity-and-texture-of-oblique-angle-deposited-aln-thin-films-using-reactive-synchronized-hipims