# Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks

> Research article (Journal of Intelligent Manufacturing, 2022) · cited 61× · AI/ML

**Wikidata**: [openalex:W4207016755](https://www.wikidata.org/wiki/openalex:W4207016755)  
**Source**: https://4ort.xyz/entity/improving-automated-visual-fault-inspection-for-semiconductor-manufacturing-using-a-hybrid-multistage-system-of-deep-neu