# Improvements in resist performance towards EUV HVM

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 62× · AI/ML

**Wikidata**: [openalex:W2598677901](https://www.wikidata.org/wiki/openalex:W2598677901)  
**Source**: https://4ort.xyz/entity/improvements-in-resist-performance-towards-euv-hvm