# Improvement of depth of focus control using wafer geometry

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 12× · AI/ML

**Wikidata**: [openalex:W2034957327](https://www.wikidata.org/wiki/openalex:W2034957327)  
**Source**: https://4ort.xyz/entity/improvement-of-depth-of-focus-control-using-wafer-geometry