# Impact of pattern dependency of SiGe layers grown selectively in source/drain on the performance of 14nm node FinFETs

> Research article (Solid-State Electronics, 2016) · cited 23× · AI/ML

**Wikidata**: [openalex:W1140767409](https://www.wikidata.org/wiki/openalex:W1140767409)  
**Source**: https://4ort.xyz/entity/impact-of-pattern-dependency-of-sige-layers-grown-selectively-in-source-drain-on-the-performance-of-14nm-node-finfets