# Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

> Research article (Thin Solid Films, 2020) · cited 21× · AI/ML

**Wikidata**: [openalex:W3001780012](https://www.wikidata.org/wiki/openalex:W3001780012)  
**Source**: https://4ort.xyz/entity/impact-of-negative-bias-on-the-piezoelectric-properties-through-the-incidence-of-abnormal-oriented-grains-in-al0-62sc0-3