# Impact of bandwidth on contrast sensitive structures for low k1 lithography

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 12× · AI/ML

**Wikidata**: [openalex:W2046338578](https://www.wikidata.org/wiki/openalex:W2046338578)  
**Source**: https://4ort.xyz/entity/impact-of-bandwidth-on-contrast-sensitive-structures-for-low-k1-lithography