# Imbalance aware lithography hotspot detection: a deep learning approach

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2017) · cited 104× · AI/ML

**Wikidata**: [openalex:W2750396644](https://www.wikidata.org/wiki/openalex:W2750396644)  
**Source**: https://4ort.xyz/entity/imbalance-aware-lithography-hotspot-detection-a-deep-learning-approach