# Imaging performance of EUV lithography optics configuration for sub-9nm resolution

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 24× · AI/ML

**Wikidata**: [openalex:W1976089671](https://www.wikidata.org/wiki/openalex:W1976089671)  
**Source**: https://4ort.xyz/entity/imaging-performance-of-euv-lithography-optics-configuration-for-sub-9nm-resolution