# Image-Guided Nanopositioning Scheme for SEM

> Research article (IEEE Transactions on Automation Science and Engineering, 2016) · cited 24× · AI/ML

**Wikidata**: [openalex:W2466504897](https://www.wikidata.org/wiki/openalex:W2466504897)  
**Source**: https://4ort.xyz/entity/image-guided-nanopositioning-scheme-for-sem