# ILT optimization of EUV masks for sub-7nm lithography

> Research article (33rd European Mask and Lithography Conference, 2017) · cited 18× · AI/ML

**Wikidata**: [openalex:W2760358816](https://www.wikidata.org/wiki/openalex:W2760358816)  
**Source**: https://4ort.xyz/entity/ilt-optimization-of-euv-masks-for-sub-7nm-lithography