# Identification of Si film traps in p-channel SOI FinFETs using low temperature noise spectroscopy

> Research article (Solid-State Electronics, 2015) · cited 13× · AI/ML

**Wikidata**: [openalex:W1992528911](https://www.wikidata.org/wiki/openalex:W1992528911)  
**Source**: https://4ort.xyz/entity/identification-of-si-film-traps-in-p-channel-soi-finfets-using-low-temperature-noise-spectroscopy