# <i>(Invited) </i>MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology

> Research article (ECS Transactions, 2019) · cited 13× · AI/ML

**Wikidata**: [openalex:W2978594305](https://www.wikidata.org/wiki/openalex:W2978594305)  
**Source**: https://4ort.xyz/entity/i-invited-i-mems-accelerometer-fabricated-by-gold-multi-layer-metal-technology