# <i>In Situ</i> Atomic Force Microscopy Depth-Corrected Three-Dimensional Focused Ion Beam Based Time-of-Flight Secondary Ion Mass Spectroscopy: Spatial Resolution, Surface Roughness, Oxidation

> Research article (Microscopy and Microanalysis, 2020) · cited 13× · AI/ML

**Wikidata**: [openalex:W3109277997](https://www.wikidata.org/wiki/openalex:W3109277997)  
**Source**: https://4ort.xyz/entity/i-in-situ-i-atomic-force-microscopy-depth-corrected-three-dimensional-focused-ion-beam-based-time-of-flight-secondary-io