# Hyperspectral imaging for high-throughput, spatially resolved spectroscopic scatterometry of silicon nanopillar arrays

> Research article (Optics Express, 2020) · cited 20× · AI/ML

**Wikidata**: [openalex:W3008346789](https://www.wikidata.org/wiki/openalex:W3008346789)  
**Source**: https://4ort.xyz/entity/hyperspectral-imaging-for-high-throughput-spatially-resolved-spectroscopic-scatterometry-of-silicon-nanopillar-arrays