# Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching

> Research article (Journal of Microelectromechanical Systems, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4387805823](https://www.wikidata.org/wiki/openalex:W4387805823)  
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