# Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition

> Research article (Ceramics International, 2019) · cited 13× · AI/ML

**Wikidata**: [openalex:W2974750550](https://www.wikidata.org/wiki/openalex:W2974750550)  
**Source**: https://4ort.xyz/entity/highly-self-oriented-growth-of-020-and-002-monoclinic-hfo2-thick-films-using-laser-chemical-vapor-deposition
