# Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses

> Research article (Nanoscale Advances, 2023) · cited 15× · AI/ML

**Wikidata**: [openalex:W4388552753](https://www.wikidata.org/wiki/openalex:W4388552753)  
**Source**: https://4ort.xyz/entity/highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses