# High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography

> Research article (Beilstein Journal of Nanotechnology, 2018) · cited 12× · AI/ML

**Wikidata**: [openalex:W2883760419](https://www.wikidata.org/wiki/openalex:W2883760419)  
**Source**: https://4ort.xyz/entity/high-throughput-synthesis-of-modified-fresnel-zone-plate-arrays-via-ion-beam-lithography