# High-Tactile Sensitivity of Piezoresistive Sensors With a Micro-Crack Structure Induced by Thin Film Tension

> Research article (IEEE Electron Device Letters, 2019) · cited 34× · AI/ML

**Wikidata**: [openalex:W2961160852](https://www.wikidata.org/wiki/openalex:W2961160852)  
**Source**: https://4ort.xyz/entity/high-tactile-sensitivity-of-piezoresistive-sensors-with-a-micro-crack-structure-induced-by-thin-film-tension
