# High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy

> Research article (Review of Scientific Instruments, 2015) · cited 30× · AI/ML

**Wikidata**: [openalex:W2009396002](https://www.wikidata.org/wiki/openalex:W2009396002)  
**Source**: https://4ort.xyz/entity/high-stroke-silicon-on-insulator-mems-nanopositioner-control-design-for-non-raster-scan-atomic-force-microscopy