# High-Speed Focus Inspection System Using a Position-Sensitive Detector

> Research article (Sensors, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2772247353](https://www.wikidata.org/wiki/openalex:W2772247353)  
**Source**: https://4ort.xyz/entity/high-speed-focus-inspection-system-using-a-position-sensitive-detector