# High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation

> Research article (Microsystem Technologies, 2015) · cited 26× · AI/ML

**Wikidata**: [openalex:W1675529102](https://www.wikidata.org/wiki/openalex:W1675529102)  
**Source**: https://4ort.xyz/entity/high-speed-and-precision-control-of-a-piezoelectric-positioner-with-hysteresis-resonance-and-disturbance-compensation