# High sensitivity, thermal noise-driven aluminum-based resonant MEMS humidity sensor

> Research article (Sensors and Actuators A Physical, 2024) · cited 11× · AI/ML

**Wikidata**: [openalex:W4402024773](https://www.wikidata.org/wiki/openalex:W4402024773)  
**Source**: https://4ort.xyz/entity/high-sensitivity-thermal-noise-driven-aluminum-based-resonant-mems-humidity-sensor