# High-Resolution Two-Dimensional Imaging of the 4H-SiC MOSFET Channel by Scanning Capacitance Microscopy

> Research article (Nanomaterials, 2021) · cited 18× · AI/ML

**Wikidata**: [openalex:W3176289171](https://www.wikidata.org/wiki/openalex:W3176289171)  
**Source**: https://4ort.xyz/entity/high-resolution-two-dimensional-imaging-of-the-4h-sic-mosfet-channel-by-scanning-capacitance-microscopy
