# High Resolution Surface Metrology Using Microsphere‐Assisted Interference Microscopy

> Research article (physica status solidi (a), 2019) · cited 15× · AI/ML

**Wikidata**: [openalex:W2917142629](https://www.wikidata.org/wiki/openalex:W2917142629)  
**Source**: https://4ort.xyz/entity/high-resolution-surface-metrology-using-microsphereassisted-interference-microscopy