# High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light

> Research article (Optics Letters, 2015) · cited 16× · AI/ML

**Wikidata**: [openalex:W2224614415](https://www.wikidata.org/wiki/openalex:W2224614415)  
**Source**: https://4ort.xyz/entity/high-resolution-subsurface-microscopy-of-cmos-integrated-circuits-using-radially-polarized-light