# High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators

> Research article (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019) · cited 14× · AI/ML

**Wikidata**: [openalex:W2969536347](https://www.wikidata.org/wiki/openalex:W2969536347)  
**Source**: https://4ort.xyz/entity/high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators