# High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices With Integrated PDMS Bumps

> Research article (IEEE Electron Device Letters, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4387757638](https://www.wikidata.org/wiki/openalex:W4387757638)  
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