# High-resolution non-destructive three-dimensional imaging of integrated circuits

> Research article (Nature, 2017) · cited 478× · AI/ML

**Wikidata**: [openalex:W2595276417](https://www.wikidata.org/wiki/openalex:W2595276417)  
**Source**: https://4ort.xyz/entity/high-resolution-non-destructive-three-dimensional-imaging-of-integrated-circuits