# High-resolution EUV lithography using a multi-trigger resist

> Research article (Extreme Ultraviolet (EUV) Lithography IX, 2018) · cited 13× · AI/ML

**Wikidata**: [openalex:W2792417832](https://www.wikidata.org/wiki/openalex:W2792417832)  
**Source**: https://4ort.xyz/entity/high-resolution-euv-lithography-using-a-multi-trigger-resist